Invention Grant
- Patent Title: Method and apparatus for detection of particle size in a fluid
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Application No.: US16885257Application Date: 2020-05-27
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Publication No.: US11441992B2Publication Date: 2022-09-13
- Inventor: Mehdi Vaez-Iravani , Todd Egan , Guoheng Zhao
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01N15/02
- IPC: G01N15/02 ; G01N15/14 ; G01N15/00

Abstract:
Examples disclosed herein generally relate to systems and methods for detecting the size of a particle in a fluid. In one example, a system for imaging a particle includes a first imaging device. The first imaging device includes a lens and a digital detector. The system further includes a laser source. He laser source is configured to emit a first laser beam and a second laser beam. The digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens. The accumulated light is scattered from the particle. The accumulated light includes light from the first laser beam and the second laser beam.
Public/Granted literature
- US20210372911A1 METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID Public/Granted day:2021-12-02
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