Invention Grant
- Patent Title: Testing apparatus
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Application No.: US17168422Application Date: 2021-02-05
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Publication No.: US11442096B2Publication Date: 2022-09-13
- Inventor: Kentaro Konishi , Jun Fujihara
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JPJP2020-026167 20200219
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R31/26 ; G05D23/19

Abstract:
A testing apparatus includes multiple testing units arrayed in a first axial direction in plan view, the multiple testing units being configured to respectively press probes against electronic devices on chucks to test the electronic devices, multiple gas circulating units respectively disposed in areas each corresponding to one or more testing units among the multiple testing units, the multiple gas circulating units respectively including first fans configured to circulate a gas in the areas along a second axial direction in plan view, multiple temperature detecting units configured to respectively detect temperatures of the chucks, and a controller configured to control drive of the first fans of the multiple gas circulating units based on the detected temperatures of the chucks.
Public/Granted literature
- US20210255233A1 TESTING APPARATUS Public/Granted day:2021-08-19
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