Invention Grant
- Patent Title: Imprint method, imprint apparatus, and method of manufacturing article
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Application No.: US17150267Application Date: 2021-01-15
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Publication No.: US11442361B2Publication Date: 2022-09-13
- Inventor: Tatsuya Arakawa
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JPJP2020-007019 20200120
- Main IPC: G03F7/00
- IPC: G03F7/00

Abstract:
The present invention provides an imprint method of forming a pattern on an imprint material on a substrate using a mold, comprising: performing preliminary curing of irradiating the imprint material with light to cure the imprint material to a first target hardness; and performing main curing of irradiating the imprint material with curing light to cure the imprint material to a second target hardness, wherein the preliminary curing includes a first process of irradiating the imprint material with first light to which the imprint material has first reaction sensitivity, and a second process of irradiating the imprint material with second light to which the imprint material has second reaction sensitivity lower than the first reaction sensitivity, and is controlled such that an end timing of the second process is later than an end timing of the first process.
Public/Granted literature
- US20210223689A1 IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE Public/Granted day:2021-07-22
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