Invention Grant
- Patent Title: Inkjet apparatus and method for manufacturing functional element using the same
-
Application No.: US17002972Application Date: 2020-08-26
-
Publication No.: US11446941B2Publication Date: 2022-09-20
- Inventor: Naoari Shibata , Norihiko Ochi , Junri Ishikura , Masayuki Morohashi
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Venable LLP
- Priority: JPJP2018-035078 20180228,JPJP2019-017046 20190201
- Main IPC: B41J2/165
- IPC: B41J2/165 ; B41J25/00 ; H01L51/00

Abstract:
An inkjet apparatus includes an inkjet head, a scanning mechanism, a surrounding portion surrounding a predetermined region in which the inkjet head is moved by the scanning mechanism in plan view of the substrate surface and which comprises a height at which a nozzle surface of the inkjet head is disposed in side view of the substrate surface, and a vapor supply portion provided outside the substrate surface and in the region surrounded by the surrounding portion in plan view of the substrate surface. The scanning mechanism is configured to control relative positions of the inkjet head and the substrate surface. The vapor supply portion is configured to supply a vapor of the same material as a component of a solvent contained in the ink to the region surrounded by the surrounding portion.
Information query
IPC分类: