Invention Grant
- Patent Title: Vacuum pump and spiral plate, spacer, and rotating cylindrical body each included vacuum pump
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Application No.: US16336006Application Date: 2017-09-29
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Publication No.: US11448223B2Publication Date: 2022-09-20
- Inventor: Takashi Kabasawa
- Applicant: Edwards Japan Limited
- Applicant Address: JP Chiba
- Assignee: Edwards Japan Limited
- Current Assignee: Edwards Japan Limited
- Current Assignee Address: JP Chiba
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: JPJP2016-198102 20161006
- International Application: PCT/JP2017/035471 WO 20170929
- International Announcement: WO2018/066471 WO 20180412
- Main IPC: F04D19/04
- IPC: F04D19/04 ; F04D29/32 ; F04D29/38 ; F04D29/54

Abstract:
In a vacuum pump, an outer diameter of a spiral plate disposed on a downstream side is set smaller than an outer diameter of a spiral plate disposed on an upstream side. Specifically, a stepped portion is provided by setting a blade length of the spiral plate disposed on the downstream side shorter than a blade length of the spiral plate disposed on the upstream side. In addition, in a spacer provided in the stepped portion, a relief formation portion is provided to allow a contact surface in contact with an upstream spacer (i.e., spacer opposed to the spiral plate having the unreduced outer diameter) and a contact surface in contact with a downstream spacer (i.e., spacer opposed to the spiral plate having the reduced outer diameter) in the stepped portion to have an equal inner diameter.
Public/Granted literature
- US20200025206A1 VACUUM PUMP AND SPIRAL PLATE, SPACER, AND ROTATING CYLINDRICAL BODY EACH INCLUDED VACUUM PUMP Public/Granted day:2020-01-23
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