Invention Grant
- Patent Title: Ultrasonic device and inspection device
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Application No.: US16297767Application Date: 2019-03-11
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Publication No.: US11448622B2Publication Date: 2022-09-20
- Inventor: Kazuhiro Itsumi , Yasuharu Hosono , Tomio Ono , Mitsunaga Saito
- Applicant: Kabushiki Kaisha Toshiba
- Applicant Address: JP Minato-ku
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2018-169697 20180911
- Main IPC: H01L41/113
- IPC: H01L41/113 ; H01L41/047 ; B06B1/06 ; G01N29/34 ; H01L41/083 ; G01N29/32 ; H01L41/04

Abstract:
According to one embodiment, an ultrasonic device includes an ultrasonic transmitter. The ultrasonic transmitter includes a first element, a second element, and a driver. The first element is flexing-vibratable at a first resonant frequency. The second element is flexing-vibratable at a second resonant frequency different from the first resonant frequency. The driver is configured to supply a first electrical signal to the first element and to supply a second electrical signal to the second element. The first electrical signal includes a first signal having the first resonant frequency. The second electrical signal includes a second signal having the second resonant frequency.
Public/Granted literature
- US20200080974A1 ULTRASONIC DEVICE AND INSPECTION DEVICE Public/Granted day:2020-03-12
Information query
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