Invention Grant
- Patent Title: Resist composition and method of forming resist pattern
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Application No.: US16441652Application Date: 2019-06-14
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Publication No.: US11448963B2Publication Date: 2022-09-20
- Inventor: Masatoshi Arai , Takaya Maehashi , Koshi Onishi
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: JPJP2018-115625 20180618
- Main IPC: G03F7/039
- IPC: G03F7/039 ; G03F7/30 ; G03F7/038 ; G03F7/004 ; C08F212/14 ; C08F220/18 ; G03F7/20 ; G03F7/16 ; G03F7/32 ; G03F7/38

Abstract:
A resist composition including a base component and an acid generator component, the base component including a resin component having a structural unit (a0) represented by general formula (a0) shown below, and the acid generator component containing at least one of a compound (b-1), a compound (b-2) and a compound (b-3) represented by general formula (b-3) shown below in which Wa represents a divalent aromatic hydrocarbon group; Ra00 represents an acid dissociable group; R101, R104 and R106 each independently represents a hydrocarbon group containing an aromatic ring; R105, R107 and R108 each independently represents a cyclic group, a chain alkyl group which may have a substituent or a chain alkenyl group; R102 represents a fluorine atom or a fluorinated alkyl group of 1 to 5 carbon atoms and M′m+ represents an m-valent onium cation.
Public/Granted literature
- US20190384174A1 RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN Public/Granted day:2019-12-19
Information query
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