Invention Grant
- Patent Title: Photoresist-removing liquid and photoresist-removing method
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Application No.: US16633159Application Date: 2018-08-02
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Publication No.: US11448966B2Publication Date: 2022-09-20
- Inventor: Sophia Z. Wen , Fucheng Sun , Zhikai Wang
- Applicant: HUAYING RESEARCH CO., LTD
- Applicant Address: CN Wuxi
- Assignee: HUAYING RESEARCH CO., LTD
- Current Assignee: HUAYING RESEARCH CO., LTD
- Current Assignee Address: CN Wuxi
- Agency: EcoTech Law Group, P.C.
- Priority: CN201710657370.6 20170803,CN201710969167.2 20171018
- International Application: PCT/CN2018/098332 WO 20180802
- International Announcement: WO2019/024892 WO 20190207
- Main IPC: C11D7/50
- IPC: C11D7/50 ; G03F7/42 ; B08B3/08 ; C11D7/04 ; C11D7/26 ; C11D7/32 ; C11D11/00 ; H01L21/027

Abstract:
The present invention discloses a photoresist-removing solution comprising of an N-containing compound and an organic substance in a mass ratio of 1:(0.5-150). The N-containing compound includes at least one of the followings: tetraalkylammonium hydroxide, ammonia, liquid ammonia, and a mixture of ammonia and water; wherein the tetraalkylammonium hydroxide has the general formula (I): wherein R1, R2, R3, R4 is an alkyl with 1 to 4 carbons, respectively. The organic substance is an organic substance having at least one electron-withdrawing functional group. The present invention mixes a specific kind of N-containing compound and a specific kind of organic substance in a certain ratio, and preferably adds a certain amount of water, so that the removal liquid in the present application has an extremely excellent photoresist-removing effect.
Public/Granted literature
- US20210157242A1 PHOTORESIST-REMOVING LIQUID AND PHOTORESIST-REMOVING METHOD Public/Granted day:2021-05-27
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