- Patent Title: Method for analyzing electromigration (EM) in integrated circuit
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Application No.: US17209393Application Date: 2021-03-23
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Publication No.: US11455448B2Publication Date: 2022-09-27
- Inventor: Chin-Shen Lin , Ming-Hsien Lin , Wan-Yu Lo , Meng-Xiang Lee
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: G06F30/00
- IPC: G06F30/00 ; G06F30/3308 ; G06F30/392 ; G06F119/10 ; G06F119/02

Abstract:
Methods for analyzing electromigration (EM) in an integrated circuit (IC) are provided. The layout of the IC is obtained. A metal segment is selected from the layout according to a current simulation result of the IC. EM rule is kept on the metal segment when a single via is formed over and in contact with the metal segment in the layout. The EM rule is relaxed on the metal segment when two first vias are formed over and in contact with the metal segment in the layout. The two first vias have the same current direction.
Public/Granted literature
- US20210209278A1 METHOD FOR ANALYZING ELECTROMIGRATION (EM) IN INTEGRATED CIRCUIT Public/Granted day:2021-07-08
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