Invention Grant
- Patent Title: Variable implant and wafer-level feed-forward for dopant dose optimization
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Application No.: US16944890Application Date: 2020-07-31
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Publication No.: US11455452B2Publication Date: 2022-09-27
- Inventor: Mahalingam Nandakumar , Murlidhar Bashyam , Alwin Tsao , Douglas Newman
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Andrew R. Ralston; Charles A. Brill; Frank D. Cimino
- Main IPC: G06F30/30
- IPC: G06F30/30 ; G06F30/367 ; H01L21/66 ; G06F30/398 ; G06F30/392 ; H01L21/28 ; H01L29/66 ; H01L29/423 ; G06F30/373

Abstract:
The present disclosure provides a method for adjusting implant parameter conditions in semiconductor processing by wafer and by wafer zone using in-line measurements from previous operations and a feed-forward computer model. The feed-forward model is based on a sensitivity map of in-line measured data and its effect of electrical performance. Feed-forward computer models that adjust implant parameters by wafer and by zone improve both wafer-to-wafer and within wafer electrical uniformity in semiconductor devices.
Public/Granted literature
- US20210089694A1 VARIABLE IMPLANT AND WAFER-LEVEL FEED-FORWARD FOR DOPANT DOSE OPTIMIZATION Public/Granted day:2021-03-25
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