Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US17345195Application Date: 2021-06-11
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Publication No.: US11456035B2Publication Date: 2022-09-27
- Inventor: Shizuka Kutsukake
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2020-182677 20201030
- Main IPC: G11C16/08
- IPC: G11C16/08 ; G11C16/24 ; G11C16/30 ; H01L27/11556 ; H01L27/11582

Abstract:
A semiconductor memory device of embodiments includes: a memory cell array including a plurality of memory cells; and a control circuit controlling an operation of each of the memory cells and including a first capacitor. The first capacitor includes: a semiconductor substrate having a first face and a second face facing the first face and including a first semiconductor region of p-type, a second semiconductor region of n-type provided between the first face and the first semiconductor region, and a third semiconductor region of p-type provided between the first face and the second semiconductor region and electrically connected to the first semiconductor region; a first electrode electrically connected to the second semiconductor region; and a first insulating film provided between the third semiconductor region and the first electrode.
Public/Granted literature
- US20220139458A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2022-05-05
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