Invention Grant
- Patent Title: Methods and systems for acquiring 3D diffraction data
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Application No.: US16835218Application Date: 2020-03-30
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Publication No.: US11456149B2Publication Date: 2022-09-27
- Inventor: Bart Buijsse , Alexander Henstra , Yuchen Deng
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J37/26 ; H01J37/32
Abstract:
Diffraction patterns of a sample at various tilt angles are acquired by irradiating a region of interest using a first charged particle beam. Sample images are acquired by irradiating the region of interest using a second charged particle beam. The first and second charged particle beams are formed by splitting charged particles generated by a charged particle source.
Public/Granted literature
- US20210305010A1 METHODS AND SYSTEMS FOR ACQUIRING 3D DIFFRACTION DATA Public/Granted day:2021-09-30
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