Invention Grant
- Patent Title: Measurement method and measuring jig
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Application No.: US16728161Application Date: 2019-12-27
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Publication No.: US11456199B2Publication Date: 2022-09-27
- Inventor: Ryusei Kashimura , Masanori Sato , Tetsu Tsunamoto
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Weihrouch IP
- Priority: JPJP2018-248274 20181228
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B23Q17/00 ; H01L21/67
Abstract:
In a measurement method, a terminal is brought into contact with an electrode in an electrostatic chuck in contact with a substrate that is grounded. Further, the terminal, the electrostatic chuck and the substrate are fixed, and a current value and a voltage value are measured using an ammeter and a voltmeter, respectively, that are connected to the terminal. In addition, whether or not the terminal and the electrode are electrically connected is determined from a slope of the current value and/or a peak current value based on the measured current value and the voltage value.
Public/Granted literature
- US20200211886A1 MEASUREMENT METHOD AND MEASURING JIG Public/Granted day:2020-07-02
Information query
IPC分类:
