Invention Grant
- Patent Title: Methods of forming apparatuses including air gaps between conductive lines and related apparatuses, memory devices, and electronic systems
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Application No.: US16990463Application Date: 2020-08-11
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Publication No.: US11456208B2Publication Date: 2022-09-27
- Inventor: Sidhartha Gupta , David Ross Economy , Richard J. Hill , Kyle A. Ritter , Naveen Kaushik
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/522 ; H01L23/528 ; H01L23/532 ; H01L27/11582 ; H01L27/11556

Abstract:
A method of forming an apparatus includes forming pillar structures extending vertically through a first isolation material, forming conductive lines operatively coupled to the pillar structures, forming dielectric structures overlying the conductive lines, and forming air gaps between neighboring conductive lines. The air gaps are laterally adjacent to the conductive lines with a portion of the air gaps extending above a plane of an upper surface of the laterally adjacent conductive lines and a portion of the air gaps extending below a plane of a lower surface of the laterally adjacent conductive lines. Apparatuses, memory devices, methods of forming a memory device, and electronic systems are also disclosed.
Information query
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