Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
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Application No.: US17004173Application Date: 2020-08-27
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Publication No.: US11456218B2Publication Date: 2022-09-27
- Inventor: Guilei Wang , Henry H Radamson , Zhenzhen Kong , Junjie Li , Jinbiao Liu , Junfeng Li , Huaxiang Yin
- Applicant: Institute of Microelectronics, Chinese Academy of Sciences
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Goodwin Procter, LLP
- Priority: CN202010494852.6 20200603,CN202010495562.3 20200603
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L29/66 ; H01L21/8238 ; H01L29/423 ; H01L27/088 ; H01L29/78

Abstract:
A semiconductor device and a method for manufacturing the semiconductor device. Multiple stacks and an isolation structure among the multiple stacks are formed on a substrate. Each stack includes a first doping layer, a channel layer and a second doping layer. For each stack, the channel layer is laterally etched from at least one sidewall of said stack to form a cavity located between the first doping layer and the second doping layer, and a gate dielectric layer and a gate layer are formed in the cavity. A first sidewall of each stack is contact with the isolation structure, and the at least one sidewall does not include the first side wall. Costly high-precision etching is not necessary, and therefore a device with a small size and a high performance can be achieved with a simple process and a low cost. Diversified device structures can be provided on requirement.
Public/Granted literature
- US20210384080A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2021-12-09
Information query
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