Invention Grant
- Patent Title: Gate-all-around FETs having uniform threshold voltage
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Application No.: US16849156Application Date: 2020-04-15
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Publication No.: US11456219B2Publication Date: 2022-09-27
- Inventor: Ruqiang Bao , Dechao Guo , Junli Wang , Heng Wu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Samuel Waldbaum
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L21/8238 ; H01L27/092 ; H01L21/3215 ; H01L21/28 ; H01L29/78 ; H01L29/06

Abstract:
A technique relates to a semiconductor device. An N-type field effect transistor (NFET) and a P-type field effect transistor (PFET) each include an inner work function metal, an outer work function metal, a first nanosheet including an inner channel surface having a first threshold voltage, and a second nanosheet including an outer channel surface having a second threshold voltage. The outer work function metal is modified so as to cause the outer channel surface for the second nanosheet to have the second threshold voltage within a predefined amount of the first threshold voltage for the inner channel surface of the first nanosheet, the predefined amount being within about 20 millivolts (mV).
Public/Granted literature
- US20200243399A1 GATE-ALL-AROUND FETS HAVING UNIFORM THRESHOLD VOLTAGE Public/Granted day:2020-07-30
Information query
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