Invention Grant
- Patent Title: Method for measuring chips bonding strength and chips bonding auxiliary structure
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Application No.: US16906330Application Date: 2020-06-19
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Publication No.: US11456221B2Publication Date: 2022-09-27
- Inventor: Sheng Zhang , Chien-Kee Pang , Xin Zhao
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsinchu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Priority: CN202010396124.1 20200512
- Main IPC: H01L21/66
- IPC: H01L21/66

Abstract:
A method for measuring chips bonding strength includes steps as follows: An auxiliary pattern is formed on a first surface of a first chip. A second surface of a second chip is bonded to the first surface to form at least one gap space surrounding the auxiliary pattern. Next, dimensions of the at least one gap space and the auxiliary pattern are measure respectively; and the bonding strength between the first chip and the second chip is estimated according to the dimensions.
Public/Granted literature
- US20210358818A1 METHOD FOR MEASURING CHIPS BONDING STRENGTH AND CHIPS BONDING AUXILIARY STRUCTURE Public/Granted day:2021-11-18
Information query
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