Invention Grant
- Patent Title: Semiconductor device with stress-relieving structures and method for fabricating the same
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Application No.: US16934833Application Date: 2020-07-21
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Publication No.: US11456242B2Publication Date: 2022-09-27
- Inventor: Tse-Yao Huang
- Applicant: NANYA TECHNOLOGY CORPORATION
- Applicant Address: TW New Taipei
- Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee: NANYA TECHNOLOGY CORPORATION
- Current Assignee Address: TW New Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/498 ; H01L23/528 ; H01L21/48

Abstract:
The present application discloses a semiconductor device with two stress-relieving structures and a method for fabricating the semiconductor device. The semiconductor device includes a semiconductor substrate, a first stress-relieving structure including a first conductive frame positioned above the semiconductor substrate and a plurality of first insulating pillars positioned within the conductive frame, a second stress-relieving structure including a plurality of second conductive pillars positioned above the first stress-relieving structure and a second insulating frame, the plurality of second conductive pillars is positioned within the second insulating frame, and a conductive structure including a supporting portion positioned above the second stress-relieving structure, a conductive portion positioned adjacent to the supporting portion, and a plurality of spacers attached to two sides of the conductive portion. The plurality of second conductive pillars is disposed correspondingly above the plurality of first insulating pillars, and the second insulating frame is disposed correspondingly above the first conductive frame.
Public/Granted literature
- US20220028776A1 SEMICONDUCTOR DEVICE WITH STRESS-RELIEVING STRUCTURES AND METHOD FOR FABRICATING THE SAME Public/Granted day:2022-01-27
Information query
IPC分类: