Invention Grant
- Patent Title: Wafer processing method
-
Application No.: US17171213Application Date: 2021-02-09
-
Publication No.: US11456260B2Publication Date: 2022-09-27
- Inventor: Shunsuke Teranishi , Shigefumi Okada , Shuichiro Tsukiji , Yuki Ikku
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain, Ltd.
- Priority: JPJP2020-028751 20200221
- Main IPC: H01L21/78
- IPC: H01L21/78 ; H01L21/66 ; H01L23/544 ; H01L21/268

Abstract:
A wafer processing method for forming a modified layer within a wafer along planned dividing lines forms the modified layer within the wafer, positions a condensing point within the wafer or at a top surface of the wafer and applies a second laser beam while moving the condensing point, images reflected light, and determines a processed state of the wafer on the basis of an imaged image. The second laser beam is formed such that a sectional shape of the second laser beam in a plane perpendicular to a traveling direction of the second laser beam is not axisymmetric with respect to an axis along the planned dividing lines.
Public/Granted literature
- US20210265279A1 WAFER PROCESSING METHOD Public/Granted day:2021-08-26
Information query
IPC分类: