Invention Grant
- Patent Title: Three-dimensional memory device with backside source contact
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Application No.: US16881294Application Date: 2020-05-22
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Publication No.: US11456290B2Publication Date: 2022-09-27
- Inventor: Kun Zhang , Linchun Wu , Wenxi Zhou , Zhiliang Xia , Zongliang Huo
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L25/18
- IPC: H01L25/18 ; H01L25/065 ; H01L23/00 ; H01L25/00

Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a peripheral circuit on the substrate, a memory stack including interleaved conductive layers and dielectric layers above the peripheral circuit, a first semiconductor layer above the memory stack, a second semiconductor layer above and in contact with the first semiconductor layer, a plurality of channel structures each extending vertically through the memory stack and the first semiconductor layer, and a source contact above the memory stack and in contact with the second semiconductor layer.
Public/Granted literature
- US20210320094A1 THREE-DIMENSIONAL MEMORY DEVICE WITH BACKSIDE SOURCE CONTACT Public/Granted day:2021-10-14
Information query
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