Invention Grant
- Patent Title: Integrated assemblies having voids along regions of gates, and methods of forming conductive structures
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Application No.: US17318940Application Date: 2021-05-12
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Publication No.: US11456299B2Publication Date: 2022-09-27
- Inventor: Sanh D. Tang
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
Some embodiments include an integrated assembly with a semiconductor-material-structure having a first source/drain region, a second source/drain region, and a channel region between the first and second source/drain regions. The semiconductor-material-structure has a first side and an opposing second side. A first conductive structure is adjacent to the first side and is operatively proximate the channel region to gatedly control coupling of the first and second source/drain regions through the channel region. A second conductive structure is adjacent to the second side and is spaced from the second side by an intervening region which includes a void. Some embodiments include methods of forming integrated assemblies.
Public/Granted literature
- US20210265356A1 Integrated Assemblies Having Voids Along Regions of Gates, and Methods of Forming Conductive Structures Public/Granted day:2021-08-26
Information query
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