Invention Grant
- Patent Title: Semiconductor memory device and manufacturing method thereof
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Application No.: US17005285Application Date: 2020-08-27
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Publication No.: US11456305B2Publication Date: 2022-09-27
- Inventor: Chih-Jung Chen , Hung-Hsun Shuai
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Priority: CN202010742405.8 20200729
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/11521 ; H01L27/11565 ; H01L27/11519 ; H01L27/11568

Abstract:
A semiconductor memory device includes a substrate, an isolation layer, a trench, a semiconductor active structure, and a floating gate electrode. The isolation layer is disposed on the substrate. The trench penetrates through the isolation layer and exposes a part of the substrate. The semiconductor active structure is disposed in the trench, and the floating gate electrode is disposed on the semiconductor active structure. A manufacturing method of the semiconductor memory device includes the following steps. The isolation layer is formed on the substrate. The trench is formed penetrating through the isolation layer and exposing a part of the substrate. The semiconductor active structure is formed in the trench. The floating gate electrode is formed on the semiconductor active structure.
Public/Granted literature
- US20220037344A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2022-02-03
Information query
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