Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16865988Application Date: 2020-05-04
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Publication No.: US11456312B2Publication Date: 2022-09-27
- Inventor: Young Ock Hong
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon-si Gyeonggi-do
- Assignee: SK hynix Inc.
- Current Assignee: SK hynix Inc.
- Current Assignee Address: KR Icheon-si Gyeonggi-do
- Agency: William Park & Associates Ltd.
- Priority: KR10-2019-0120994 20190930
- Main IPC: H01L27/1158
- IPC: H01L27/1158 ; H01L27/11573 ; H01L27/11565

Abstract:
A semiconductor memory device includes a substrate including a peripheral circuit; an interconnection array disposed on the peripheral circuit; a cell stack structure disposed on the interconnection array, the cell stack structure including gate electrodes stacked in a vertical direction to form a cell step structure; and a dummy stack structure disposed on the interconnection array, the dummy stack structure including sacrificial layers stacked in the vertical direction to form a dummy step structure parallel to the cell step structure. The interconnection array includes a first lower conductive pattern including a center region overlapping with a slit between the cell step structure and the dummy step structure, a first region extending to overlap with the dummy step structure from the center region, and a second region extending to overlap with the cell step structure from the center region.
Public/Granted literature
- US20210098476A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2021-04-01
Information query
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