Invention Grant
- Patent Title: Phase change memory cell with a wrap around and ring type of electrode contact and a projection liner
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Application No.: US17114594Application Date: 2020-12-08
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Publication No.: US11456415B2Publication Date: 2022-09-27
- Inventor: Injo Ok , Ruqiang Bao , Andrew Herbert Simon , Kevin W. Brew , Nicole Saulnier , Iqbal Rashid Saraf , Muthumanickam Sankarapandian , Sanjay C. Mehta
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24

Abstract:
A semiconductor structure may include a heater surrounded by a dielectric layer, a projection liner on top of the heater, a phase change material layer above the projection liner, and a top electrode contact surrounding a top portion of the phase change material layer, The projection liner may cover a top surface of the heater. The projection liner may separate the phase change material layer from the second dielectric layer and the heater. The projection liner may provide a parallel conduction path in the crystalline phase and the amorphous phase of the phase change material layer. The top electrode contact may be separated from the phase change material layer by a metal liner. The semiconductor structure may include a bottom electrode below and in electrical contact with the heater and a top electrode above and in electrical contact with the phase change material layer.
Public/Granted literature
- US20220181546A1 PHASE CHANGE MEMORY CELL WITH A WRAP AROUND AND RING TYPE OF ELECTRODE CONTACT AND A PROJECTION LINER Public/Granted day:2022-06-09
Information query
IPC分类: