Invention Grant
- Patent Title: MEMS microphone
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Application No.: US16835805Application Date: 2020-03-31
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Publication No.: US11459230B2Publication Date: 2022-10-04
- Inventor: Jien-Ming Chen , Feng-Chia Hsu , Wen-Shan Lin , Hsin-Li Lee , Nai-Hao Kuo
- Applicant: Fortemedia, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Fortemedia, Inc.
- Current Assignee: Fortemedia, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H04R19/00
- IPC: H04R19/00 ; B81B3/00 ; H04R19/04 ; H04R7/04
Abstract:
A MEMS microphone includes a substrate, a backplate disposed on a side of the substrate, a diaphragm movably disposed between the substrate and the backplate, and a plurality of slots formed on the diaphragm. The slots are spaced apart from each other and have a non-constant width to relieve the residual stress on the diaphragm.
Public/Granted literature
- US20200339411A1 MEMS MICROPHONE Public/Granted day:2020-10-29
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