Invention Grant
- Patent Title: Polishing composition containing amphoteric surfactant
-
Application No.: US16605950Application Date: 2018-04-10
-
Publication No.: US11459486B2Publication Date: 2022-10-04
- Inventor: Hiroaki Sakaida , Eiichiro Ishimizu
- Applicant: NISSAN CHEMICAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee: NISSAN CHEMICAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JPJP2017-081531 20170417
- International Application: PCT/JP2018/015089 WO 20180410
- International Announcement: WO2018/193916 WO 20181025
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C08K3/22 ; C08K3/26 ; C08K3/36 ; C08K5/17 ; C08K5/19 ; C08K5/42 ; C09G1/04 ; C09K3/14 ; H01L21/304 ; H01L21/321

Abstract:
There are provided a polishing composition that gives, in the step of polishing a wafer, a flat polished surface having a reduced height difference between a central region and a peripheral region (laser mark region) of the wafer, and a method for producing a wafer using the polished composition. A polishing composition comprising water, silica particles, an alkaline substance, and an amphoteric surfactant of formula (1): wherein R1 is a C10-20 alkyl group, or a C1-5 alkyl group containing an amide group; R2 and R3 are each independently a C1-9 alkyl group; and X−is a C1-5 anionic organic group containing a carboxylate ion or a sulfonate ion. Silica particles in the form of an aqueous dispersion of silica particles having a mean primary particle diameter of 5 to 100 nm may be used. A method for producing a wafer, wherein in the step of polishing a wafer, polishing is performed until a height difference between a central region and a peripheral region of the wafer becomes 100 nm or less.
Public/Granted literature
- US2564753A Corrosion inhibitor composition Public/Granted day:1951-08-21
Information query