Articles consisting of metal, hard metal, cermet or ceramic and coated with a hard material, and method for producing such articles
Abstract:
Articles containing metal, hard metal, cermet or ceramic and coated with a hard material, and a method for producing same. The hard material layers can be used as anti-wear layers for cutting tools, as protective layers for turbine blades, or as diffusion barriers in microelectronics. The hard material layers exhibit a high hardness, high oxidation resistance, and excellent wear resistance. The articles are coated with a single- or multi-layer layer system by a thermal CVD method without plasma excitation, where the single- or multi-layer layer system includes at least one nanocomposite layer with a first nanocrystalline phase of cubic titanium oxycarbonitride and a second, amorphous phase of silicon oxycarbonitride or silicon oxycarbide.
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