Invention Grant
- Patent Title: Film forming apparatus for forming metal film
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Application No.: US16841801Application Date: 2020-04-07
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Publication No.: US11459667B2Publication Date: 2022-10-04
- Inventor: Yuki Sato
- Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Applicant Address: JP Toyota
- Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHA
- Current Assignee Address: JP Toyota
- Agency: Dickinson Wright, PLLC
- Priority: JPJP2019-084847 20190426
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D11/00

Abstract:
Provided is a metal film forming apparatus capable of forming a uniform metal film on a surface of a substrate by uniformly pressurizing an electrolyte membrane against the surface of the substrate. The film forming apparatus includes first and second film forming units, a coupling portion that couples the first and second film forming units together, a pressure device including a pressure unit that pressurizes substrates with electrolyte membranes of the respective film forming units via the coupling portion, and a power supply unit adapted to apply a voltage across each anode and each substrate. The film forming units are coupled to the coupling portion via their respective first elastic bodies that elastically deform in the pressurization direction of the pressure unit.
Public/Granted literature
- US11427922B2 Film forming apparatus for forming metal film Public/Granted day:2022-08-30
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