Invention Grant
- Patent Title: Vacuum dryer
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Application No.: US16795109Application Date: 2020-02-19
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Publication No.: US11460247B2Publication Date: 2022-10-04
- Inventor: Jung Wook Lee , Yeon Ju Kwon , Do Hyun Kim , Jung Soo Kim , Ga Hee Park , Ha Jun Song , Do Yoon Lee , Hun Hyeon Im
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2019-0036164 20190328
- Main IPC: F26B5/04
- IPC: F26B5/04 ; G03F7/16 ; F26B3/20
Abstract:
A vacuum dryer including a chamber configured to provide an interior space, support pins in the interior space proximate to a bottom of the chamber, a power supply configured to supply power to the support pins, and a pump coupled to the interior space in the chamber.
Public/Granted literature
- US20200309452A1 VACUUM DRYER Public/Granted day:2020-10-01
Information query
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