- Patent Title: Measurement apparatus and control method of measurement apparatus
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Application No.: US16574909Application Date: 2019-09-18
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Publication No.: US11460297B2Publication Date: 2022-10-04
- Inventor: Nobuyuki Nishita
- Applicant: TOPCON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOPCON CORPORATION
- Current Assignee: TOPCON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Chiesa Shahinian & Giantomasi PC
- Priority: JPJP2018-177406 20180921,JPJP2019-149697 20190819
- Main IPC: G01C3/00
- IPC: G01C3/00 ; G01C3/08 ; G01S17/42 ; G01S17/89 ; G01S7/481 ; G01S7/497

Abstract:
A measurement apparatus is provided that includes a distance measuring unit, a deflecting unit, and a calculation control unit which controls the distance measuring unit and the deflecting unit. The calculation control unit detects coordinates of a pair of intersection points of the object to be measured and a scan trajectory with the measurement light on the basis of a distance measurement result by the distance measuring unit and the direction of emission deflected by the deflecting unit. The calculation control unit controls a deflection operation of the deflecting unit so as to change the direction of emission on the basis of the coordinates of the pair of intersection points such that the scan trajectory with the measurement light and the object to be measured intersect with each other.
Public/Granted literature
- US20200096333A1 MEASUREMENT APPARATUS AND CONTROL METHOD OF MEASUREMENT APPARATUS Public/Granted day:2020-03-26
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