Invention Grant
- Patent Title: Table
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Application No.: US16546585Application Date: 2019-08-21
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Publication No.: US11460354B2Publication Date: 2022-10-04
- Inventor: Yoshinobu Saito
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: DISCO CORPORATION
- Current Assignee: DISCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JPJP2018-159258 20180828
- Main IPC: G01K11/00
- IPC: G01K11/00 ; G01K11/12 ; B25B11/00

Abstract:
A table for heating or cooling a workpiece includes a plate member having a mounting surface for mounting the workpiece and a temperature control unit heating or cooling the plate member. A paint layer is formed on the mounting surface of the plate member, in which when the plate member is not heated or cooled by the temperature control unit and accordingly has a first temperature, the paint layer exhibits a first color, and when the temperature of the plate member is changed by the temperature control unit and the temperature of the mounting surface accordingly becomes a second temperature different from the first temperature, the color of the paint layer is changed to a second color different from the first color.
Public/Granted literature
- US20200072679A1 TABLE Public/Granted day:2020-03-05
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