Invention Grant
- Patent Title: Sensor test system
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Application No.: US16575646Application Date: 2019-09-19
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Publication No.: US11460520B2Publication Date: 2022-10-04
- Inventor: Kazunari Suga , Daisuke Takano , Satoshi Hanamura , Michiro Chiba , Hisao Nishizaki , Atsushi Hayakawa
- Applicant: ADVANTEST Corporation
- Applicant Address: JP Tokyo
- Assignee: ADVANTEST Corporation
- Current Assignee: ADVANTEST Corporation
- Current Assignee Address: JP Tokyo
- Agency: Osha Bergman Watanabe & Burton LLP
- Priority: JPJP2018-234116 20181214
- Main IPC: G01R33/07
- IPC: G01R33/07 ; G01D5/14 ; G01R33/31 ; G01R33/09
Abstract:
A sensor test system having excellent throughput is provided.
The sensor test system 1 includes a test apparatus group 20 including a plurality of sensor test apparatuses 30A to 30D coupled to each other so that the sensor 90 can be transferred, and each of the sensor test apparatuses 30A to 30D includes an application unit 40 including an application device 42 including a socket 445 to which the sensor 90 is electrically connected, and a pressure chamber 43 which applies a pressure to the sensor 90, a test unit 35 which tests the sensor 90 via the socket 445, and a conveying robot 33 which conveys the sensor 90 into and out of the application unit 40.
The sensor test system 1 includes a test apparatus group 20 including a plurality of sensor test apparatuses 30A to 30D coupled to each other so that the sensor 90 can be transferred, and each of the sensor test apparatuses 30A to 30D includes an application unit 40 including an application device 42 including a socket 445 to which the sensor 90 is electrically connected, and a pressure chamber 43 which applies a pressure to the sensor 90, a test unit 35 which tests the sensor 90 via the socket 445, and a conveying robot 33 which conveys the sensor 90 into and out of the application unit 40.
Information query
