Optical element and laser irradiation device
Abstract:
Ununiformity of a light intensity of a laser beam is appropriately reduced. An optical element receives a laser beam having a light intensity distribution and provides wavefront aberration of the received laser beam in a first direction orthogonal to a traveling direction larger than a diffraction limit, and provides wavefront aberration of the received laser beam in a second direction orthogonal to the traveling direction and the first direction equal to or smaller than the diffraction limit.
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