- Patent Title: Resist composition, method of forming resist pattern, and compound
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Application No.: US16700780Application Date: 2019-12-02
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Publication No.: US11460770B2Publication Date: 2022-10-04
- Inventor: Takuya Ikeda , Junichi Miyakawa
- Applicant: TOKYO OHKA KOGYO CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee: TOKYO OHKA KOGYO CO., LTD.
- Current Assignee Address: JP Kawasaki
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: JPJP2018-227686 20181204
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07C323/09 ; C07C309/06 ; G03F7/20 ; G03F7/30 ; G03F7/16

Abstract:
A resist composition containing a base material component of which solubility in a developing solution is changed due to an action of an acid and a compound represented by Formula (bd1); in the formula, Rbd1 to Rbd3 each independently represent an aryl group which may have a substituent, provided that one or more of Rbd1 to Rbd3 are aryl groups having a fluorinated alkyl group which may have a substituent, and at least one of the fluorinated alkyl groups which may have a substituent in these aryl groups is bonded to a carbon atom adjacent to a carbon atom that is bonded to a sulfur atom in the formula, and a total number of the fluorinated alkyl groups which may have a substituent is 2 or more; X− represents a counter anion.
Public/Granted literature
- US20200174365A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, AND COMPOUND Public/Granted day:2020-06-04
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