Invention Grant
- Patent Title: Fluid control system and flow rate measurement method
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Application No.: US16634603Application Date: 2018-07-24
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Publication No.: US11460869B2Publication Date: 2022-10-04
- Inventor: Satoru Yamashita , Yohei Sawada , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Studebaker & Brackett PC
- Priority: JPJP2017-148264 20170731
- International Application: PCT/JP2018/027755 WO 20180724
- International Announcement: WO2019/026700 WO 20190207
- Main IPC: F17D1/00
- IPC: F17D1/00 ; G05D7/06

Abstract:
A fluid control system (1) comprises: a first valve (21) provided downstream of a flow rate controller (10), a flow rate measuring device (30) provided downstream of the first valve (21) and having a second valve (22), an open/close detector (26) provided to the second valve (22), and a controller (25) for controlling an open/close operation of the first valve (21) and the second valve (22), and the controller (25) controls the open/close operation of the first valve (21) in response to a signal output from the open/close detector (26).
Public/Granted literature
- US20200159257A1 Fluid Control System and Flow Rate Measurement Method Public/Granted day:2020-05-21
Information query
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