Invention Grant
- Patent Title: Semiconductor device
-
Application No.: US17010451Application Date: 2020-09-02
-
Publication No.: US11462562B2Publication Date: 2022-10-04
- Inventor: Yumi Nakajima , Satoshi Nagashima
- Applicant: Kioxia Corporation
- Applicant Address: JP Tokyo
- Assignee: Kioxia Corporation
- Current Assignee: Kioxia Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JPJP2019-172099 20190920
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11519 ; H01L27/11524 ; H01L27/11565 ; H01L27/1157 ; H01L23/544 ; H01L27/11556

Abstract:
According to one embodiment, a semiconductor device comprising: a first stacked structure in which first insulating layers and first conductive layers are alternately stacked; a second stacked structure in which second insulating layers and second conductive layers are alternately stacked; a first memory pillar provided in the first stacked structure; a first dividing structure dividing the first conductive layers; a second memory pillar provided within the second stacked structure and connected to the first memory pillar; a second dividing structure dividing the second conductive layers; a first alignment mark pillar provided in the first stacked structure and projecting from the first stacked structure; a second alignment mark pillar provided on the first alignment mark pillar; an alignment mark surrounded by the second alignment mark pillar.
Public/Granted literature
- US20210091112A1 SEMICONDUCTOR DEVICE Public/Granted day:2021-03-25
Information query
IPC分类: