Invention Grant
- Patent Title: Memory device and manufacturing method thereof
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Application No.: US17012056Application Date: 2020-09-04
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Publication No.: US11462563B2Publication Date: 2022-10-04
- Inventor: Yong-Sheng Huang , Ming-Chyi Liu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/528 ; H01L27/11568 ; H01L21/28

Abstract:
A memory device and a manufacturing method are provided. The method includes: forming a first conductive pattern on a substrate; forming an active structure over the first conductive pattern, wherein the active structure comprises a gate pattern, a channel pillar and a charge storage layer, the channel pillar penetrates the gate pattern and electrically connects with the first conductive pattern, and the charge storage layer is disposed between the gate pattern and the channel pillar; forming a second conductive pattern over the active structure, wherein the second conductive pattern is electrically connected with the channel pillar; and performing formation of the active structure one more time, such that the channel pillars of the active structures are vertically spaced apart from each other, and electrically connected to the second conductive pattern extending in between the channel pillars.
Information query
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