Invention Grant
- Patent Title: Method for producing synthetic quartz glass substrate
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Application No.: US16431315Application Date: 2019-06-04
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Publication No.: US11465260B2Publication Date: 2022-10-11
- Inventor: Yoko Ishitsuka , Atsushi Watabe , Masaki Takeuchi
- Applicant: Shin-Etsu Chemical Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JPJP2018-107892 20180605
- Main IPC: B24C9/00
- IPC: B24C9/00 ; C03C19/00 ; B24C1/08

Abstract:
The invention provides a method for producing a synthetic quartz glass substrate, the method includes arranging spacers to be in contact with outer peripheral side surfaces of a synthetic quartz glass substrate, arranging plate materials to be in contact with the outer peripheral side surfaces of the spacers in a state that the plates are protruded from the surface of the substrate, and sandblasting the surface of the substrate.
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