Invention Grant
- Patent Title: Thin film capacitor and method of manufacturing the same
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Application No.: US16681887Application Date: 2019-11-13
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Publication No.: US11476055B2Publication Date: 2022-10-18
- Inventor: Takeshi Kagawa , Junko Izumitani , Masatomi Harada , Hiroshi Matsubara , Nobuhiro Ishida
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: ArentFox Schiff LLP
- Priority: JPJP2017-148330 20170731
- Main IPC: H01G4/33
- IPC: H01G4/33 ; H01G4/012 ; H01G4/228 ; H01G4/30 ; H01L21/822 ; H01L27/04 ; H01L49/02

Abstract:
A capacitor that includes a lower electrode; a dielectric film; an upper electrode; a first protective film that has a first through hole that opens to the upper electrode and a second through hole that opens to the lower electrode, and has a first upper surface; a second protective film that has a second upper surface located higher than the first upper surface of the first protective film; a first terminal electrode electrically connected to the upper electrode through the first through hole, and extends to at least the second upper surface of the second protective film; and a second terminal electrode electrically connected to the lower electrode through the second through hole, and extends to at least the second upper surface of the second protective film.
Public/Granted literature
- US20200082989A1 THIN FILM CAPACITOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2020-03-12
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