Invention Grant
- Patent Title: System and method of power generation with phase linked solid-state generator modules
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Application No.: US16881390Application Date: 2020-05-22
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Publication No.: US11476092B2Publication Date: 2022-10-18
- Inventor: Kenneth Trenholm , Mohammad Kamarehi , Mohamed Shaheen , Bryan Gallivan
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Burns & Levinson LLP
- Agent Joseph M. Maraia; Steven M. Mills
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H03L7/099 ; H05H1/46

Abstract:
A plasma generation system includes a reference clock, a plurality of solid state generator modules, and a processing chamber. The reference clock is configured to generate a reference signal. Each solid state generator module is linked to an electronic switch and each electronic switch is linked to the reference clock. The solid state generator modules are each configured to generate an output based on the reference signal from the reference clock. The processing chamber is configured to receive the output of at least two of the solid state generator modules to combine the outputs of said solid state generator modules therein.
Public/Granted literature
- US20200381219A1 SYSTEM AND METHOD OF POWER GENERATION WITH PHASE LINKED SOLID-STATE GENERATOR MODULES Public/Granted day:2020-12-03
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