Invention Grant
- Patent Title: Selective micro device transfer to receiver substrate
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Application No.: US17365708Application Date: 2021-07-01
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Publication No.: US11476216B2Publication Date: 2022-10-18
- Inventor: Gholamreza Chaji , Ehsanollah Fathi
- Applicant: VueReal Inc.
- Applicant Address: CA Waterloo
- Assignee: VueReal Inc.
- Current Assignee: VueReal Inc.
- Current Assignee Address: CA Waterloo
- Agency: Nixon Peabody LLP
- Priority: CACA2879465 20150123,CACA2879627 20150123,CACA2880718 20150128,CACA2883914 20150304,CACA2890398 20150504,CACA2887186 20150512,CACA2891007 20150512,CACA2891027 20150512
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L21/20 ; H01L23/00 ; H01L21/687 ; H01L25/075 ; H01L25/16 ; H01L51/00 ; H01L25/00 ; G01R31/26 ; H01L21/683 ; H01L21/66 ; H05K13/04
Abstract:
A method of selectively transferring micro devices from a donor substrate to contact pads on a receiver substrate. Micro devices being attached to a donor substrate with a donor force. The donor substrate and receiver substrate are aligned and brought together so that selected micro devices meet corresponding contact pads. A receiver force is generated to hold selected micro devices to the contact pads on the receiver substrate. The donor force is weakened and the substrates are moved apart leaving selected micro devices on the receiver substrate. Several methods of generating the receiver force are disclosed, including adhesive, mechanical and electrostatic techniques.
Public/Granted literature
- US20210327740A1 SELECTIVE MICRO DEVICE TRANSFER TO RECEIVER SUBSTRATE Public/Granted day:2021-10-21
Information query
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