Invention Grant
- Patent Title: Method and system for bonding a chip to a substrate
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Application No.: US16320180Application Date: 2017-07-25
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Publication No.: US11476228B2Publication Date: 2022-10-18
- Inventor: Gari Arutinov , Edsger Constant Pieter Smits , Jeroen van den Brand
- Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL 's-Gravenhage
- Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
- Current Assignee Address: NL 's-Gravenhage
- Agency: Leydig, Voit & Mayer, Ltd.
- Priority: EP16181184 20160726
- International Application: PCT/NL2017/050504 WO 20170725
- International Announcement: WO2018/021912 WO 20180201
- Main IPC: B23K1/00
- IPC: B23K1/00 ; H01L23/00 ; H05K3/34 ; B23K1/005 ; B23K1/20 ; H01L21/67 ; H01L23/498 ; H01L33/62 ; B23K101/42

Abstract:
A method and system for heat bonding a chip to a substrate by means of heat bonding material disposed there between. At least the substrate is preheated from an initial temperature to an elevated temperature below a damage temperature of the substrate. A light pulse applied to the chip momentarily increases the chip temperature to a pulsed peak temperature below a peak damage temperature of the chip. The momentarily increased pulsed peak temperature of the chip causes a flow of conducted heat from the chip to the bonding material, causing the bonding material to form a bond.
Public/Granted literature
- US20190229085A1 METHOD AND SYSTEM FOR BONDING A CHIP TO A SUBSTRATE Public/Granted day:2019-07-25
Information query
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