Invention Grant
- Patent Title: Memory devices including void spaces between transistor features, and related semiconductor devices and electronic systems
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Application No.: US17301793Application Date: 2021-04-14
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Publication No.: US11476259B2Publication Date: 2022-10-18
- Inventor: Kamal M. Karda , Ramanathan Gandhi , Hong Li , Haitao Liu , Durai Vishak Nirmal Ramaswamy , Sanh D. Tang , Scott E. Sills
- Applicant: Kamal M. Karda , Ramanathan Gandhi , Hong Li , Haitao Liu , Durai Vishak Nirmal Ramaswamy , Sanh D. Tang , Scott E. Sills
- Applicant Address: US ID Boise; SG Singapore; US NM Albuquerque; US ID Boise; US ID Boise; US ID Meridian; US ID Boise
- Assignee: Kamal M. Karda,Ramanathan Gandhi,Hong Li,Haitao Liu,Durai Vishak Nirmal Ramaswamy,Sanh D. Tang,Scott E. Sills
- Current Assignee: Kamal M. Karda,Ramanathan Gandhi,Hong Li,Haitao Liu,Durai Vishak Nirmal Ramaswamy,Sanh D. Tang,Scott E. Sills
- Current Assignee Address: US ID Boise; SG Singapore; US NM Albuquerque; US ID Boise; US ID Boise; US ID Meridian; US ID Boise
- Agency: TraskBritt
- Main IPC: H01L27/112
- IPC: H01L27/112 ; H01L29/786 ; H01L29/423 ; H01L29/10

Abstract:
A device comprises a vertical transistor. The vertical transistor comprises a semiconductive pillar, at least one gate electrode, a gate dielectric material, and void spaces. The semiconductive pillar comprises a source region, a drain region, and a channel region extending vertically between the source region and the drain region, the channel region comprising a semiconductive material having a band gap greater than 1.65 electronvolts. The at least one gate electrode laterally neighbors the semiconductive pillar. The gate dielectric material is laterally between the semiconductive pillar and the at least one gate electrode. The void spaces are vertically adjacent the gate dielectric material and laterally intervening between the at least one gate electrode and each of the source region and the drain region of the semiconductive pillar. Related electronic systems and methods are also disclosed.
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