Invention Grant
- Patent Title: Photodetector with buried airgap reflectors
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Application No.: US16842080Application Date: 2020-04-07
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Publication No.: US11476289B2Publication Date: 2022-10-18
- Inventor: Siva P. Adusumilli , Vibhor Jain , Alvin J. Joseph , Steven M. Shank
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Calderon Safran & Cole, P.C.
- Agent David Cain; Andrew M. Calderon
- Main IPC: H01L27/146
- IPC: H01L27/146
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to photodetectors with buried airgap mirror reflectors. The structure includes a photodetector and at least one airgap in a substrate under the photodetector.
Public/Granted literature
- US20210313373A1 PHOTODETECTOR WITH BURIED AIRGAP REFLECTORS Public/Granted day:2021-10-07
Information query
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