Invention Grant
- Patent Title: Acoustic resonator
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Application No.: US16435621Application Date: 2019-06-10
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Publication No.: US11476833B2Publication Date: 2022-10-18
- Inventor: Tae Yoon Kim , Tae Kyung Lee , Sang Kee Yoon , Sung Jun Lee , Chang Hyun Lim , Nam Jung Lee , Tae Hun Lee , Moon Chul Lee
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2018-0145454 20181122
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/02 ; H03H9/13

Abstract:
An acoustic resonator includes a substrate, an insulation layer disposed on the substrate, a resonating portion disposed on the insulation layer and having a first electrode, a piezoelectric layer, and a second electrode, stacked thereon, a cavity disposed between the insulation layer and the resonating portion, a protruded portion having a plurality of protrusions disposed on a lower surface of the cavity, and a hydrophobic layer disposed on an upper surface of the cavity and a surface of the protruded portion.
Public/Granted literature
- US20200169246A1 ACOUSTIC RESONATOR Public/Granted day:2020-05-28
Information query
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