Piezoelectric microphone chip and piezoelectric microphone
Abstract:
The piezoelectric microphone chip includes a single thin plate, a diaphragm support structure that is provided on one surface of the thin plate and includes an outer edge support portion that supports an outer edge of the thin plate and a separation support portion that separates the thin plate into a plurality of diaphragms in association with the outer edge support portion, a single or a plurality of piezoelectric conversion portions formed by laminating a first electrode, a piezoelectric film, and a second electrode sequentially from a diaphragm side on each of the diaphragms, and a signal detection circuit that detects outputs from the piezoelectric conversion portions provided on the plurality of diaphragms, and a relationship among a thickness t1 of the outer edge support portion, a thickness t2 of the separation support portion, and a thickness td of the thin plate 10 is set to 13.3×td
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