Invention Grant
- Patent Title: Piezoelectric microphone chip and piezoelectric microphone
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Application No.: US16669515Application Date: 2019-10-31
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Publication No.: US11477580B2Publication Date: 2022-10-18
- Inventor: Takayuki Naono
- Applicant: FUJIFILM CORPORATION
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM CORPORATION
- Current Assignee: FUJIFILM CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Solaris Intellectual Property Group, PLLC
- Priority: JPJP2017-092960 20170509
- Main IPC: H04R17/02
- IPC: H04R17/02 ; H01L41/053 ; H01L41/113 ; H04R1/06

Abstract:
The piezoelectric microphone chip includes a single thin plate, a diaphragm support structure that is provided on one surface of the thin plate and includes an outer edge support portion that supports an outer edge of the thin plate and a separation support portion that separates the thin plate into a plurality of diaphragms in association with the outer edge support portion, a single or a plurality of piezoelectric conversion portions formed by laminating a first electrode, a piezoelectric film, and a second electrode sequentially from a diaphragm side on each of the diaphragms, and a signal detection circuit that detects outputs from the piezoelectric conversion portions provided on the plurality of diaphragms, and a relationship among a thickness t1 of the outer edge support portion, a thickness t2 of the separation support portion, and a thickness td of the thin plate 10 is set to 13.3×td
Information query