Invention Grant
- Patent Title: Manufacturing device for mask unit
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Application No.: US16515115Application Date: 2019-07-18
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Publication No.: US11484971B2Publication Date: 2022-11-01
- Inventor: Mototsugu Nariya
- Applicant: Japan Display Inc.
- Applicant Address: JP Tokyo
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedlich LLP
- Priority: JPJP2018-139301 20180725
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C14/04 ; B23K26/21 ; H01L51/00

Abstract:
A manufacturing device for mask unit having a mask frame and a mask fixed to the mask frame includes a stage including a frame holding stage, and an alignment stage arranged with a plurality of lift-pins, a holding part for holding a reference plate arranged facing the stage, a mask holding unit, the mask holding unit being arranged between the stage and the reference plate, and a camera for imaging a direction of the stage passing through the reference plate, wherein the mask holding unit holds the mask at a surface on the frame side, the mask holding unit rises and falls above the alignment stage by the plurality of the lift-pins, the plurality of lift-pins includes a plurality of first lift-pins capable of contacting the mask holding unit, and the camera images a first reference marker on the mask and a second reference marker on the reference plate.
Public/Granted literature
- US20200030913A1 MANUFACTURING DEVICE FOR MASK UNIT Public/Granted day:2020-01-30
Information query
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