Invention Grant
- Patent Title: Silicon coating on hard shields
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Application No.: US16250842Application Date: 2019-01-17
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Publication No.: US11486042B2Publication Date: 2022-11-01
- Inventor: Adam Andrew Preuss , Richard A. Bradley, Jr. , Georg J. Ockenfuss , Markus K. Tilsch , Andrew Clark , Marius Grigonis , Andy Shkabko , Nicolas Alexander Davis , Anthony Jay Kemp Cottrell
- Applicant: VIAVI SOLUTIONS INC.
- Applicant Address: US CA San Jose
- Assignee: VIAVI SOLUTIONS INC.
- Current Assignee: VIAVI SOLUTIONS INC.
- Current Assignee Address: US CA San Jose
- Agency: Mannava & Kang, P.C.
- Main IPC: C23C28/00
- IPC: C23C28/00 ; C23C4/131 ; C23C4/08 ; C23C4/134 ; C23C4/067 ; C23C14/16 ; C23C14/34 ; C23C4/06 ; C23C16/02 ; H01J37/32 ; C23C16/24 ; C23C28/02 ; C23C16/513 ; B32B15/04 ; H01J37/34 ; H01L23/552 ; C23C30/00 ; C23C4/10 ; B32B15/18 ; B32B15/01 ; B32B15/20 ; C23C16/12 ; C23C4/04
Abstract:
A device including a hard shield material; a layer including aluminum or copper; and a silicon layer having a first thickness is disclosed. The device can also include a silicon layer having a second thickness. A method of making the device is also disclosed.
Public/Granted literature
- US20190218669A1 SILICON COATING ON HARD SHIELDS Public/Granted day:2019-07-18
Information query
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