Pressure transducer and fabrication method thereof
Abstract:
A pressure transducer and a fabrication method thereof are provided. The pressure transducer includes a light-emitting element, an interference light-filtering structure and a light-sensing element stacked on top of each other. The light-emitting element is configured to emit incident light onto the interference light-filtering structure. The interference light-filtering structure is configured to change its thickness in accordance with the pressure exerted on the pressure transducer and generate emergent light corresponding to the pressure. The light-sensing element is configured to detect the emergent light and generate an electrical signal corresponding to the emergent light.
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