Invention Grant
- Patent Title: Photonics integrated circuit with silicon nitride waveguide edge coupler
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Application No.: US17179532Application Date: 2021-02-19
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Publication No.: US11487059B2Publication Date: 2022-11-01
- Inventor: Asli Sahin , Karen A. Nummy , Thomas Houghton , Kevin K. Dezfulian , Kenneth J. Giewont , Yusheng Bian
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: G02B6/122
- IPC: G02B6/122 ; G02B6/13

Abstract:
A photonics integrated circuit includes a semiconductor substrate; a buried insulator layer positioned over the semiconductor substrate; and a back-end-of-line (BEOL) insulator stack over a first portion of the buried insulator layer. In addition, the PIC includes a silicon nitride (SiN) waveguide edge coupler positioned in a first region over the buried insulator layer and at least partially under the BEOL insulator stack. An oxide layer extends over a side of the BEOL insulator stack. The SiN waveguide edge coupler provides better power handling and fabrication tolerance than silicon waveguide edge couplers, despite the location under various BEOL layers. The PIC can also include silicon waveguide edger coupler(s).
Public/Granted literature
- US20220268994A1 PHOTONICS INTEGRATED CIRCUIT WITH SILICON NITRIDE WAVEGUIDE EDGE COUPLER Public/Granted day:2022-08-25
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